000 | 01293nam a22002057a 4500 | ||
---|---|---|---|
008 | 231220b ||||| |||| 00| 0 eng d | ||
020 | _a9780367391638 (pbk.) | ||
082 |
_a621.381 _bGAD |
||
100 |
_aGad-el-Hak, Mohamed _910448 |
||
245 |
_aMEMS : _bdesign and fabrication |
||
250 | _a2nd ed. | ||
260 |
_aBoca Raton _bCRC Press _c2006 |
||
300 | _axii, 1-5,2-26,3-214,4-79,5-53,6-20,7-35,8-15,9-39,10-35,11-25, 12-28,13-23,14-19,I-17p., | ||
440 |
_amechanical engineering series _910467 |
||
500 | _ahttps://www.routledge.com/MEMS-Design-and-Fabrication/Gad-el-Hak/p/book/9780367391638 | ||
520 | _aAs our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection of MEMS knowledge available, packaged in an attractive slipcase and offered at a substantial savings. This best-selling handbook is now more convenient than ever, and its coverage is unparalleled. | ||
650 |
_aMicrofabrication _99782 |
||
650 |
_aMicroelectromechanical systems--Design and construction _910449 |
||
942 | _cBK | ||
999 |
_c9906 _d9906 |