000 01293nam a22002057a 4500
008 231220b ||||| |||| 00| 0 eng d
020 _a9780367391638 (pbk.)
082 _a621.381
_bGAD
100 _aGad-el-Hak, Mohamed
_910448
245 _aMEMS :
_bdesign and fabrication
250 _a2nd ed.
260 _aBoca Raton
_bCRC Press
_c2006
300 _axii, 1-5,2-26,3-214,4-79,5-53,6-20,7-35,8-15,9-39,10-35,11-25, 12-28,13-23,14-19,I-17p.,
440 _amechanical engineering series
_910467
500 _ahttps://www.routledge.com/MEMS-Design-and-Fabrication/Gad-el-Hak/p/book/9780367391638
520 _aAs our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection of MEMS knowledge available, packaged in an attractive slipcase and offered at a substantial savings. This best-selling handbook is now more convenient than ever, and its coverage is unparalleled.
650 _aMicrofabrication
_99782
650 _aMicroelectromechanical systems--Design and construction
_910449
942 _cBK
999 _c9906
_d9906