000			01626nam a2200205 4500
008			231206b ||||| |||| 00| 0 eng d
020			_a9788132206637 (pbk)
082			_a621.381 _bADA
100			_aAdams, Thomas M. _910391
245			_aIntroductory MEMS : _bfabrication and applications
260			_aNew Delhi _bSpringer India Pvt Ltd _c2010
300			_axv, 444p.
500			_ahttps://www.yesdee.com/product/introductory-mems-fabrication-and-applications/
520			_aIntroductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to micro fluidics. Multiple field-tested laboratory exercises are included, designed to facilitate student learning about the fundamentals of micro fabrication processes. References, suggested reading, review questions, and homework problems are provided at the close of each chapter. Introductory MEMS: Fabrication and Applications is an excellent introduction to the subject, with a tested pedagogical structure and an accessible writing style suitable for students at an advanced undergraduate level across academic disciplines.
650			_aMicroelectromechanical systems _910388
650			_aMechanics _9372
650			_aSystems engineering _9937
700			_aLayton, Richard A. _910390
942			_cBK
999			_c9883 _d9883