000			01328nam a2200193 4500
008			231206b ||||| |||| 00| 0 eng d
020			_a9780470083017 (hb)
082			_a621.381 _bHSU
100			_aHsu, Tai-Ran _910387
245			_aMEMS and microsystems : _bdesign, manufacture, and nanoscale engineering
260			_aNew Jersey _bJohn Wiley & Sons _c2008
300			_axxv, 550p.
500			_ahttps://www.wiley.com/en-br/MEMS+and+Microsystems:+Design,+Manufacture,+and+Nanoscale+Engineering,+2nd+Edition-p-9780470083017
520			_aAn engineering design approach to Microelectromechanical Systems, MEMS and Microsystems remains the only available text to cover both the electrical and the mechanical aspects of the technology. In the five years since the publication of the first edition, there have been significant changes in the science and technology of miniaturization, including microsystems technology and nanotechnology. In response to the increasing needs of engineers to acquire basic knowledge and experience in these areas, this popular text has been carefully updated, including an entirely new section on the introduction of nanoscale engineering.
650			_aMicroelectromechanical systems _910388
650			_aMicroelectronics _94181
650			_aMicroelectronic packaging _910389
942			_cBK
999			_c9882 _d9882