| 000 | 00505nam a2200169Ia 4500 | ||
|---|---|---|---|
| 008 | 210916s9999 xx 000 0 und d | ||
| 020 | _a9788126532605 | ||
| 082 |
_a621.38152 _bMAY |
||
| 100 |
_aMay, Gary S. _94153 |
||
| 245 | 0 | _aFundamentals of Semiconductor fabrication | |
| 260 |
_aNew Delhi _bWiley _c2004 |
||
| 300 | _a305p. | ||
| 650 |
_aSemiconductors--Design and construction _94154 |
||
| 650 |
_aIntegrated circuits--Design and construction _94155 |
||
| 700 |
_aSze, Simon M. _94156 |
||
| 942 | _cBK | ||
| 999 |
_c6683 _d6683 |
||