Foundations of MEMS

By:

Liu, Chang

Material type: Text

TextPublication details: Noida Pearson India Education Services Pvt.Ltd. 2011Edition: 2nd edDescription: 576pISBN:

9788131764756 (pbk.)

Subject(s):

DDC classification:

621.3 LIU

Summary: "For courses in Micro-Electro-Mechanical Systems (MEMS) taken by advanced undergraduate students, beginning graduate students, and professionals. Foundations of MEMS is an entry-level text designed to systematically teach the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication technology — all in a time-efficient and methodical manner. A wealth of examples and problems solidify students’ understanding of abstract concepts and provide ample opportunities for practicing critical thinking."

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Holdings
Item type	Current library	Collection	Call number	Status	Barcode
Book	Plaksha University Library	Engineering	621.3 LIU (Browse shelf(Opens below))	Available	004663
Book	Plaksha University Library	Engineering	621.3 LIU (Browse shelf(Opens below))	Available	004664
Book	Plaksha University Library	Engineering	621.3 LIU (Browse shelf(Opens below))	Available	004665

https://www.pearson.com/en-us/subject-catalog/p/foundations-of-mems/P200000003213/9780133002515

"For courses in Micro-Electro-Mechanical Systems (MEMS) taken by advanced undergraduate students, beginning graduate students, and professionals.

Foundations of MEMS is an entry-level text designed to systematically teach the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication technology — all in a time-efficient and methodical manner. A wealth of examples and problems solidify students’ understanding of abstract concepts and provide ample opportunities for practicing critical thinking."

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