TY  - BOOK
AU  - Gad-el-Hak, Mohamed
TI  - MEMS: design and fabrication
SN  - 9780367391638 (pbk.)
U1  - 621.381  
PY  - 2006///
CY  - Boca Raton	
PB  - CRC Press
KW  - Microfabrication
KW  - Microelectromechanical systems--Design and construction
N1  - https://www.routledge.com/MEMS-Design-and-Fabrication/Gad-el-Hak/p/book/9780367391638
N2  - As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection of MEMS knowledge available, packaged in an attractive slipcase and offered at a substantial savings. This best-selling handbook is now more convenient than ever, and its coverage is unparalleled
ER  -