Gad-el-Hak, Mohamed <br/><br/>
MEMS :  design and fabrication 

 - 2nd ed. 
 - Boca Raton	  CRC Press  2006 
 - xii, 1-5,2-26,3-214,4-79,5-53,6-20,7-35,8-15,9-39,10-35,11-25, 12-28,13-23,14-19,I-17p., 
 - mechanical engineering series .
<br/><br/> https://www.routledge.com/MEMS-Design-and-Fabrication/Gad-el-Hak/p/book/9780367391638 
<br/><br/> As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection of MEMS knowledge available, packaged in an attractive slipcase and offered at a substantial savings. This best-selling handbook is now more convenient than ever, and its coverage is unparalleled. 
<br/><br/><label>ISBN: </label>9780367391638 (pbk.) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microfabrication<br/>Microelectromechanical systems--Design and construction
<br/><br/><label>Dewey Class. No.: </label>621.381   / GAD