TY  - BOOK
AU  - Hsu, Tai-Ran
TI  - MEMS and microsystems : : design, manufacture, and nanoscale engineering
SN  - 9780470083017 (hb)
U1  - 621.381  
PY  - 2008///
CY  - New Jersey	
PB  - John Wiley & Sons
KW  - Microelectromechanical systems	
KW  - Microelectronics	
KW  - Microelectronic packaging
N1  - https://www.wiley.com/en-br/MEMS+and+Microsystems:+Design,+Manufacture,+and+Nanoscale+Engineering,+2nd+Edition-p-9780470083017
N2  - An engineering design approach to Microelectromechanical Systems, MEMS and Microsystems remains the only available text to cover both the electrical and the mechanical aspects of the technology. In the five years since the publication of the first edition, there have been significant changes in the science and technology of miniaturization, including microsystems technology and nanotechnology. In response to the increasing needs of engineers to acquire basic knowledge and experience in these areas, this popular text has been carefully updated, including an entirely new section on the introduction of nanoscale engineering
ER  -