MEMS and microsystems : design, manufacture, and nanoscale engineering

By:

Hsu, Tai-Ran

Material type: Text

TextPublication details: New Jersey John Wiley & Sons 2008Description: xxv, 550pISBN:

9780470083017 (hb)

Subject(s):

DDC classification:

621.381 HSU

Summary: An engineering design approach to Microelectromechanical Systems, MEMS and Microsystems remains the only available text to cover both the electrical and the mechanical aspects of the technology. In the five years since the publication of the first edition, there have been significant changes in the science and technology of miniaturization, including microsystems technology and nanotechnology. In response to the increasing needs of engineers to acquire basic knowledge and experience in these areas, this popular text has been carefully updated, including an entirely new section on the introduction of nanoscale engineering.

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Holdings
Item type	Current library	Collection	Call number	Status	Date due	Barcode
Book	Plaksha University Library	Engineering	621.381 HSU (Browse shelf(Opens below))	Available		004659

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https://www.wiley.com/en-br/MEMS+and+Microsystems:+Design,+Manufacture,+and+Nanoscale+Engineering,+2nd+Edition-p-9780470083017

An engineering design approach to Microelectromechanical Systems, MEMS and Microsystems remains the only available text to cover both the electrical and the mechanical aspects of the technology. In the five years since the publication of the first edition, there have been significant changes in the science and technology of miniaturization, including microsystems technology and nanotechnology. In response to the increasing needs of engineers to acquire basic knowledge and experience in these areas, this popular text has been carefully updated, including an entirely new section on the introduction of nanoscale engineering.

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