MARC details
| 000 -LEADER |
|---|
| fixed length control field |
01293nam a22002057a 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
231220b ||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9780367391638 (pbk.) |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.381 |
| Item number |
GAD |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Gad-el-Hak, Mohamed |
| 245 ## - TITLE STATEMENT |
|---|
| Title |
MEMS : |
| Remainder of title |
design and fabrication |
| 250 ## - EDITION STATEMENT |
|---|
| Edition statement |
2nd ed. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
|---|
| Place of publication, distribution, etc. |
Boca Raton |
| Name of publisher, distributor, etc. |
CRC Press |
| Date of publication, distribution, etc. |
2006 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xii, 1-5,2-26,3-214,4-79,5-53,6-20,7-35,8-15,9-39,10-35,11-25, 12-28,13-23,14-19,I-17p., |
| 440 ## - SERIES STATEMENT/ADDED ENTRY--TITLE |
|---|
| Title |
mechanical engineering series |
| 500 ## - GENERAL NOTE |
|---|
| General note |
https://www.routledge.com/MEMS-Design-and-Fabrication/Gad-el-Hak/p/book/9780367391638 |
| 520 ## - SUMMARY, ETC. |
|---|
| Summary, etc. |
As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection of MEMS knowledge available, packaged in an attractive slipcase and offered at a substantial savings. This best-selling handbook is now more convenient than ever, and its coverage is unparalleled. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Microfabrication |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Microelectromechanical systems--Design and construction |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Koha item type |
Book |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| 9 (RLIN) |
9782 |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| 9 (RLIN) |
10449 |
